|
Clean room
System Department |
|
Process
System Department |
|
|
Utility
System Department |
|
FCMS Department |
|
|
TYPICAL
PROJECT INTRODUCTION |
|
|
|
Process Piping System/Hook-up |
Sub-clean piping system |
|
|
 Supply
Total Solution from Basic Design to Installation and Maintenance
（1）UHP Gas System
（2）UHP Chemical System
（3）DI Water System
（4）PCW System
（5）PV Vacuum System
（6）WWT System
（7）EF exhaust System
（8）HPV System
（9）General Process Piping System
（10）Process Tools Hook-up |
SCOPE OF SERVICE |
Bulk Gas and special Gas piping |
|
|
TOTAL ENGINEERING & FULL TURNKER SERVICES
FOR UHP &HP UTILITY SYSTEM
(1)Technical Consulting
(2)Project Management
(3)Engineering Design & Procurement
(4)Installation
(5)Commissioning & Maintenance
(6)Validation |
| |
|
SUPPLY & INSTALLATION OF SYSTEM EQUIPMENT
(1）CDS（Chemical Dispense System）
（2）Gas Supply System（Gas Cabinet，VMB/VMP）
（3）Process Equipment（Example Wet Station, Etching System, etc） |
|
Special Gas Piping System
|
|
